An IGBT-based plasma power supply employs Insulated-Gate Bipolar Transistors (IGBTs) as switching devices within a high-frequency inverter circuit to deliver and regulate the power required for plasma generation.
These power supplies are highly valued for their:
Superior Energy Efficiency – Minimizes power loss during plasma operation.
High Power Handling – Capable of supporting demanding plasma processes.
Precision Control – Enables accurate adjustment of plasma discharge parameters for consistent performance.
Technical Specifications
Parameter
Specification
Mains Input
415V (±10V), 3 Phase, 50Hz
Maximum DC Output
150V, 10A to 400A (variable)
DC Output O.C.V
300V
Efficiency
Equal or better than 80%
Power Factor
≥0.9 at full load
Ripple Factor
≤1% of open circuit voltage
Type of Source
Constant current source
Mode of Power Supply
Switching mode power supply
Switching Component
IGBT-based full bridge topology
Advantages
High Efficiency for reduced energy consumption
Fast Switching Speeds for rapid response
Robust Performance under demanding conditions
Precise Power Control for process consistency
Superior Power Quality for reliable plasma generation